Large Scale Rotary Grinding Machine

Large Scale Rotary Surface Grinder for Glass Substrate NRG2000

  • NanoTEM's diamond grinding wheel is porous structured and can pass water and air through itself.
  • Surface morphology of the workpiece can be controlled by adjusting the distance between the workpiece and the diamond wheel.
  • Flat and curved surface can be generated by attaching a cup wheel on the left spindle and a straight wheel on the right spindle.
  • The workpiece will be fastened onto the chuck, after the chuck surface is self-sharpened. This enables high-precision processing.

NRG2000, precision diamond grinding wheel and large size porous chuck are the achievements of NanoTEM's next-generation grinding technology. We provide ideal processing solutions for flat panel display industries with increasing demands of large size displays.


Diamond grains are harder than the bond matrix, therefore when a material is pressed against the wheel, the matrix wears faster making the diamond protrude approximately 10 micron (depending on the size of the diamond grain). This enables the diamond to constantly work on the material throughout the grinding process.
Patterning of diamonds provides high penetrating force towards the workpiece resulting to high removal rate.

Diamond Grinding Wheel

NanoTEM's diamond grinding wheel has a porosity of more than 40vol%. Surface morphology of the workpiece can be managed by supplying water and air through the diamond wheel. This minimizes damage to the workpiece, shortens the time required at the next processing and provides high-precision machining.

Porous Ceramic Vacuum Chuck Table

Porous chuck passes water and air to its surface, and when loading a glass substrate, the chuck will be able to receive the glass gently on its surface.

Specifications [NRG2000]

Porous chuck Cup wheel
(left)
Straight wheel
(right)
Max Dimensions 1400x1600x40t φ450 φ400
Max Revs
(rpm)
50 2000 2000
Rotating Mechanism Motor
+Cross-roller
Motor
+Angular-bearing
Motor
+Angular-bearing
Continuous Motor Output
(kW)
7.5 7.5 3.7
Motor Output
30 minutes Rating
(kW)
11 11 5.5
X-axis Stroke
(mm)
- 1200 1200
X-axis Feed Speed Max
(mm/min)
- 5000 5000
Z-axis Stroke
(mm)
- 550 550
Water Outlet Mechanism available available available
Vacuum Mechanism available available available
AIR Out Mechanism available available available
Max Size of Grinding Diameter
(mm)
- 2300 2400
X-axis Feed Resolution
(μm)
- 0.1 0.1
Z-axis Feed Resolution
(μm)
- 0.1
(With linear scale)
0.1
(With linear scale)
Weight 21,000kg
Control Method FUNAC 18i MODEL BT series
Coolant Tank Capacity 190litre
Notes Work weight 3ton (20rpm) - -

*Specifications can be changed through consultation.



Applications

●Synthetic quartz glass for photomasks
●Mother glass for liquid crystal display up to G6 class
●Soda-lime glass(blue plate)