aeroFIX is a vacuum chuck made of porous ceramic.
Porous ceramic is a ceramic material that contains large amounts of internal holes (pores). The average porosity of our company's products is 40%. This means that 40% of the ceramic volume is composed of open space. In a sense, it is similar to the natural stone pumice.
The principle of a vacuum chuck involves generating vacuum at the surface of contact between the workpiece and chuck, and fastening the workpiece onto the chuck surface as it is pressed by atmospheric pressure. In other words, it utilizes the difference in air pressure between the top and bottom of the workpiece. It is able to hold the workpiece onto the chuck surface using only air, and without using any adhesive.
What sort of applications is it used for?
It is used to hold (fasten) a wide variety of workpieces onto machines for processing. Past examples have included solar cells, LEDs, semiconductors, liquid crystal, PCBs, and recently EL.
From 2015, we began expanding the applications beyond holding. Just as the application of a vacuum allows the workpiece to be held (chucked) in place, applying positive pressure makes it possible to lift (float) the workpiece.
Recently we have made it possible to transport, stop, and rotate a lifted workpiece by switching between positive and negative pressures.
We also successfully developed non-contact lifting transport systems. This allows a workpiece to be transported without physical contact, and is expected to result in cost savings.
Does aeroFIX have any other applications besides chucking and lifting?
It can also be used in wet environments.
Both flat products and roller products for wet environments are available.
In what industries is aeroFIX primarily used?
<Machine tool industry>
Workpiece holder jigs for surface grinders, machining centers, lapping machines, and other machine tools
<High technology industry>
Manufacturing equipment tables for FPD, OLED, semiconductors, PCBs, electronic components, printers, and other products
<Infrastructure industry>
Manufacturing equipment tables for automotive films, aircraft CFRP molding, and other products
Specifically what equipment has it been used with?
What are the advantages of using air for chucking?
It is possible to easily fasten in place non-magnetic materials such as ceramic, aluminum, resin, paper, and wood.
Because the workpiece surface is fully suctioned onto the vacuum chuck, it is able to reduce vibration.
Because the workpiece strain that occurs with clamping does not occur, processing accuracy is improved.
Can aeroFIX be used with thin workpieces such as films?
It has been used effectively to chuck films as thin as 5 μm. It leaves no suction marks and is easy to use.
By suitably controlling positive pressure and negative pressure, it is possible to stabilize the position of thin workpieces. By lifting the workpiece and applying minute force to it, it is also possible to move the workpiece on the vacuum chuck. This lifting transport resolves the issue of preventing contamination of workpieces such as ultra-thin substrates.
What material is aeroFIX made of?
It uses an alumina-based material. Based on strong requests from the customer, the regular products are black.
However we can also manufacture white products. The precise additives are a business secret.
How does alumina compare with aluminum in terms of weight?
The specific gravity of aluminum is 2.7 g/cm3, while that of porous alumina is 1.6 - 1.8 g/cm3. The specific gravity of our regular (black) products is 2.48 g/cm3 - lighter than aluminum.
What shapes and sizes is aeroFIX available in?
There are 2 primary shapes: a flat type and a roller type.
The largest flat type that we have created is 2,500 mm × 2,500 mm. The largest roller type that we have created had a diameter of φ400 mm and a length of 2,300 mm.
The material is porous ceramic, so what is the porosity?
The average porosity is approximately 40%. This is higher than the vacuum chucks produced by other companies. Larger porosity results in a higher suction force.
How is the flatness?
The flatness of a 200 mm × 200 mm chuck is 20 μm or less. Upon request, it is possible to deliver even higher accuracy.
What are the differences between the flat type and roller type?
The most advanced versions of the roller type and flat type were developed as vacuum chucks for film materials. The material specifications are the same for both, and they are effective for suctioning, lifting, and transporting. Initially during development, the specifications called for sections inside the metal insert that would decide the chucking angle. However the specifications were changed to make use of the partial chucking characteristics so that chucking is possible at any part. The features include chucking of a variety of film materials without leaving suction marks, and transporting films without the films contacting the rollers.
These products are used in manufacturing equipment and industrial machinery for paper printing, organic EL, film printing, coating, paper engineering, metal films, and other purposes. They can also be adapted for new applications.
Can the pore sizes be changed?
The pore size of our regular products is 2 μm. We can also produce product types with pore sizes of 5 μm and 15 μm. Upon request, we can adjust the pore sizes as necessary, and can produce the products that are best for the intended application.
What changes when the pore sizes are larger?
The flow speed changes. Larger pore sizes result in higher flow speeds. Higher flow speeds are advantageous when chucking films or other products that are deformed (warped) to some degree.
Is it difficult to produce 2μm pore sizes?
The pore sizes of other company products are thought to be around 10 μm. Other companies can produce small size products (around 100 mm on a side) with the same pore size, however the production of larger sizes (500 mm or more on a side) is difficult. In particular, production of uniform 2 μm pore sizes is particularly difficult.
What are the differences between an ordinary vacuum chuck and aeroFIX?
The following 5 points are the major differences between aeroFIX and ordinary vacuum chucks.
(1) aeroFIX can neutralize charged workpieces. (The surface resistance value can be adjusted.)
(2) Reflectivity can be adjusted to 5% or less.
(3) Partial chucking is possible. (Conventional vacuum chucks are only capable of chucking on their entire surface. With aeroFIX, it is not necessary to prepare different chucks according to the workpiece shape.)
(4) aeroFIX is ideally suited for films and other thin, delicate workpieces. (With previous vacuum chucks, thin workpieces were sucked into the holes in the surface, causing deformation, sagging, and strain.)
(5) aeroFIX can perform non-contact lifting transport.
Why is partial chucking possible?
They key is the size of the pores. The use of our original evacuation system with extremely small 2 μm pore sizes makes partial chucking possible. The suction force can be adjusted by increasing the vacuum pressure.
What is your original evacuation system?
The suction force changes depending on the flow rate and degree of vacuum.
We will propose a vacuum pump, size and length of the pipe that connects to the ejector, and pump type to match the customer's purpose of use.
Does aeroFIX not get clogged by dust?
It almost never gets clogged. Because the pore sizes are so small, clogging is possible only if the dust is smaller than the pore size, and dust that is 2μm or smaller is rare even in a clean room. We have encountered no cases of a workpiece being dropped due to loss of suction force caused by clogging. In addition, applying a small amount of positive pressure will eject any dust. Simple maintenance with a commercially available cleaning roller to remove surface dust is sufficient.
If dirt adheres to the surface, how can it be removed?
Unless there is a particular request for a different material, the base material is aluminum. (It is produced at plants designated by our company.)
Base material composed of stainless steel or stone (granite) can also be produced (at plants designated by our company) to meet customer needs.
When chuck flatness is required, the base is frequently made of stainless steel or stone, although this involves additional expense.
How are the base and ceramic attached?
33% is the bonding area, and the remaining 67% is the air space. In general, the thickness of the bonding layer is 0.5mmt.
Can aeroFIX be used in a wet environment?
By increasing the pore size to 5 μm or more, these products can also be used in a wet (water, solvent, etc.) environment.
Can aeroFIX be used in a high-temperature environment?
It is nearly always used inside clean rooms, however by changing the adhesive it can be used in environments up to approximately 150℃.
Is it resistant to UV radiation?
Yes. The epoxy adhesive will not come out onto the suction surface.
Is it resistant to chemicals?
Yes. However it is not resistant to strong acids and strong alkalis. Tests can be conducted by customers in advance.
Why do customers choose aeroFIX?
Reasons include the anti-static measures that allow neutralizing of charged workpieces, and the ability to chuck anywhere (partial chucking) regardless of workpiece size.
Purchasing
Is it possible to test before buying?
Feel free to request a sample from the many that are available for loan. Testing at our company (Nagaoka Headquarters or Tokyo Headquarters) is also possible.
Can products in sizes other than the regular products be produced?
We can manufacture products in the desired size and shape.
We are unable to produce drawings. Can your company handle that?
We can. If you provide us with the approximate size and product concept, we can propose a product including the drawings. Be aware that a separate SE expense is required and that the customer is responsible for final drawing approval.
Is it necessary to buy aeroFIX as a set with the base?
It is not necessary. The ceramic unit can be sold separately. Customers can also provide their own base.
You have described the high performance. Is the price also high?
Our prices are set lower than those of other companies. Performance (suction force, partial chucking, antistatic performance, etc.) is also higher than other company products.
How long is required from order to delivery?
For regular products, the required time is 3 weeks to 1 month. For other products, 1.5 - 2 months is required.
Is refacing possible if the surface becomes scratched or large deviation in parallelness occurs?
Yes, it is possible. The cost of resurfacing is several 10s of thousands yen (plus actual shipping expenses).